BioMEMS applies the MEMS technology to biomedical applications. It makes possible the production of miniature, automated, and low-cost biomedical devices (for instance, lab-on-a-chip devices).

How are the microscopic structures created?

Micropatterns are created through microfabrication techniques. The process usually starts with photolithography, i.e. transferring a pattern on a mask to a UV-sensitive material (photoresist) on the substrate. Afterwards, the substrate will be etched selectively on the regions not protected by the photoresist to create micro-features on the substrate.

What is the relation between microfluidics and BioMEMS?

Microfluidics is a multidisciplinary field comprising physics, chemistry, engineering and biotechnology that studies the behavior of fluids at the microscale and mesoscale. The microfluidic devices are often created using MEMS technology and have applications in diagnosis, drug delivery, tissue-regeneration, etc.